157nm

Mirrors
Output Couplers
Variable Attenuators
Technical Data of standard F2 Laser Components
Mirrors

Turning Mirror [ Angle of Incidence=45°, Polarisation : s,p-Pol. HRs,p ( 22.5-45°, 1030nm) > 99.7% ]

Reflection &Transmission Spectrum

• Turning mirror (AOI = 45°): Rs > 95 %
                                                  Rp > 90 %
                                                  Ru > 92 %

Laser Mirror [ Angle of Incidence=45°, Polarisation : u-Pol]

Reflection &Transmission Spectrum

• Laser mirror: R = 92 % … 95 % at AOI = 0°

Protected Aluminum Mirror

Reflection Spectrum

Enhanced Aluminum Mirror

Reflection Spectrum

Output Couplers

[Angle of Incidence=0°, Polarisation : u-Pol]

Reflection Spectrum

• High quality mirror substrates, windows and lenses of CaF2  (193 nm excimer grade quality, HELLMA Materials GmbH)               
• PR coatings with tolerances of
                ± 2 % for R = 10 % … 30 %
                ± 3 % for R = 30 % … 75 %
                and ± 2 % for R = 75 % … 90 %.
• Development and production of customer specific components like beam splitters and variable attenuators on request

Variable Attenuators
 

Transmission Spectrum

• The transmittance varies from T > 75 % at AOI = 0°
   to T < 5 % at AOI = 45°

Technical Data of standard F2 Laser Components

Coating	Spectral performance	Lifetime test
HR (0°, 157nm)	R = 92 … 95%	2 x 108 – 1 x 109 pulses*
HR (45°, 157nm)	R = 90 … 94% (random pol.)
PR (0°, 157nm)	R = 50 ± 3%	2 x 108 – 1 x 109 pulses*
PR (0°, 157nm)	R = 25 ± 3%	2 x 108 – 1 x 109 pulses*
Attenuator	T = 67 ± 3%	5 x 107 pulses**, no damage
Attenuator	T = 33 ± 3%	1 x 108 pulses***, no damage
Beam splitter	T = 20 ± 3%	1 x 108 pulses***, no damage
AR (0°, 157nm)	0.3 … 0.7%

• Energy density: 25 mJ / cm2, repetition rate: 800 Hz, pulse duration: 15 ns; tested at COHERENT AG, München
• Energy density: 15 mJ / cm2, repetition rate: 200 Hz, pulse duration: 20 ns; tested at Institut für Photonische Technologien (IPHT) Jena
•  Energy density: 20 mJ / cm2, repetition rate: 50 Hz, pulse duration:  20 ns; tested at Institut für Photonische Technologien (IPHT) Jena