308nm
Cavity Mirrors
Output Couplers
Windows and Lenses
Turning Mirrors
Attenuators
Technical Data of XeCl Laser Components
Window
Cavity Mirrors
- Oxide coatings for high mechanical stability.
- Coatings can be produced by IAD, magnetron sputtering or IBS.
Output Couplers
- PR coatings with tolerances of
- ± 2 % for R = 10 % … 30 %
- ± 3 % for R = 30 % … 75 %
- ± 2 % for R = 75 % … 90 % and
- ± 1 % for R > 90 %.
Windows and Lenses
- High quality mirror substrates, windows and lenses of fused silica.
Turning Mirrors
Turning Mirror [ Angle of Incidence=45°, Polarisation : u,s,p-Pol. HRu ( 45°, 308nm) > 99.5%, HRs ( 45°, 308nm) > 99.9%, HRp ( 45°, 308nm) > 99.5% ]
Reflection Spectrum |
Attenuators
Technical Data of XeCl Laser Components
Coating | Materials | Reflectance | Lifetime test |
HR (0°, 308 nm) | fluorides | R > 98 % | 2 x 108 pulses *** |
*** Energy density: 55 mJ / cm2, repetition rate: 100 Hz, pulse duration: 15 ns; tested at COHERENT AG, München
Window
Angle of Incidence=0°, Coating on Fused Silica 248nm excimer grade AR(0°, 308nm)<0.25%.
Transmission Spectrum |